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Microcomm's microbridge Mass Airflow Sensors Series MI-3200-AWM720PI, provide in-line flow measurement with a specially designed bypass flow housing. The sensors measure flow as high as 200 standard liters per minute (SLPM) while inducing a pressure drop of 1 inch H2O, typically. The AWM700 has a high flow range capability in a small package. The sensor has a 6-millisecond response time, requires a 10 Vdc supply, but consumes only 60 mW of power. The compact plastic package withstands overpressures of 25 psi without compromising performance. The snap-in AMP compatible connector provides reliable connection. The sensor is also well suited for use in portable devices and battery-powered applications.

The AWM700 Series sensors provide a combination of time proven reliability, high accuracy, and precision operating characteristics for use in the medical ventilation market and medical and analytical instrumentation applications. Its accuracy over life reduces the need for recalibration. AWM700 sensor circuitry performs amplification and temperature compensation.

-25 °C to 85 °C [-13 °F to 185 °F]

Microcomm's microbridge Mass Airflow Sensors Series MI-3200-AWM1100V, provides all of the outstanding performance benefits of the standard AWM2000 series in a more cost-effective sensor platform. This device provides accurate, repeatable flow sensing. Sensor to sensor interchangeability specifications are approximately twice as large as compared to the AWM2000 series.
The heater control circuit and the sensing bridge supply circuit are both required for operation per specification. These two circuits are not on board the sensor and must be supplied in the application. The differential amplifier circuitry may be useful in providing output gain and/or introducing voltage offsets to the sensor output.

Microcomm's microbridge Mass Airflow Sensors Series MI-3200-AWM2100VH are passive devices comprised of two Wheatstone bridges. The heater control circuit is required for operation per specifications. The sensing bridge supply circuit is also required for operation per specifications. These two circuits are not on board the package and must be supplied in the application. The differential amplifier is a useful interface for the sensing bridge. It can be used to introduce gain and to voltage offsets to the sensor output.

CAUTION PRODUCT DAMAGE: AWM Series Microbridge Mass Airflow Sensors are not designed to sense liquid flow and will be damaged by liquid flow through the sensor. Failure to comply with these instructions could result in product damage.

Microcomm's microbridge Mass Airflow Sensors Series MI-3200-AWM3100V, like the AWM2000 Series, the dual Wheatstone bridges control airflow measurement. The AWM3000 Series is amplified; therefore, it can be used to increase the gain and to introduce voltage offsets to the sensor output. The heater control circuit and the sensing bridge supply circuit are on board the package.

Microcomm's microbridge Mass Airflow Sensors Series MI-3200-AWM5101VA, AWM5000 Series Microbridge Mass Airflow Sensors feature a Venturi type flow housing. They measure flow as high as 20 standard liters per minute (SLPM) while inducing a maximum pressure drop of 2.25" H2O. The microbridge chip is in direct contact with the flow stream, greatly reducing error possibilities due to orifice or bypass channel clogging.

Rugged, Versatile Package: The rugged plastic package has been designed to withstand common mode pressures up to 50 psi, and the small sensing element allows 100 g of shock without compromising performance. The included "AMP" compatible connector provides reliable connection in demanding applications.

On-board Signal Conditioning: Each AWM5000 sensor contains circuitry which performs amplification, linearization, temperature compensation, and gas calibration. A 1 to 5 Vdc linear output is possible for all listings regardless of flow range (5, 10, 15, or 20 SLPM) or calibration gas (nitrogen, carbon dioxide, nitrous oxide, or argon). All calibration is performed by active laser

Separate gas calibration types:
Ar (argon), N2 (nitrogen) or CO2 (carbon dioxide)

Microcomm's microbridge Mass Airflow Sensors Series MI-3200-AWM42150VH, operates on the theory of heat transfer. Mass airflow is directed across the surface of the sensing elements. Output voltage varies in proportion to the mass air or other gas flow through the inlet and outlet ports of the package. The specially designed housing precisely directs and controls the airflow across the microstructure sensing element. Mechanical design of the package allows it to be easily mounted to printed circuit boards.

The microbridge mass airflow sensor has a unique silicon chip based on advanced microstructure technology. It consists of a thin-film, thermally isolated bridge structure containing heater and temperature sensing elements. The bridge structure provides a sensitive and fast response to the flow of air or other gas over the chip. Dual sensing elements positioned on both sides of a central heating element indicate flow direction as well as flow rate. Laser trimmed thick film and thin film resistors provide consistent interchangeability from one device to the next.

The microbridge mass airflow sensor uses temperature sensitive resistors deposited within a thin film of silicon nitride. They are suspended in the form of two bridges over an etched cavity in the silicon. The chip is located in a precisely dimensioned airflow channel to provide a repeatable flow response. Highly effective thermal isolation for the heater and sensing resistors is attained by etching the cavity space beneath the flow sensor bridges. The small size and thermal isolation of the microbridge mass airflow sensor are responsible for the extremely fast response and high sensitivity to flows.

Dual Wheatstone bridges control airflow measurement -- one provides closed loop heater control, the other contains the dual sensing elements. The heater circuit minimizes shift due to ambient temperature changes by providing an output proportional to mass flow. The circuit keeps the heater temperature at a constant differential (160 °C) above ambient air temperature which is sensed by a heat-sunk resistor on the chip. The ratiometric voltage output of the device corresponds to the differential voltage across the Wheatstone bridge circuit.

NOTICE: The effects of dust contamination, which may result form some applications, can be minimized. By design, dust particles that may be present in the air stream will flow past the chip parallel to the chip surface. In addition, the microstructure chip produces a thermophoretic effect, which repels micrometer sized dust particles away from the bridge structure.

Heater control circuit and sensing bridge supply circuit are both required for operation per specification and are not on board the sensor and must be supplied with the application. Nitrogen calibration gas.

Microcomm's microbridge Mass Airflow Sensors Series MI-3200-AWM92100V, utilize the time proven thermal bridge technology. The AWM90000 series provides many of the outstanding performance benefits of the AWM1000 series, but in a more cost effective sensor platform. They are available in two versions, Mass Flow and Differential Pressure. The AWM92100V has a flow range of +/- 200 sccm and the AWM92200V is a +/- 2.0 inch H2O differential pressure version. These sensors have fast response time of 1 ms, operate with a supply voltage of 8.0 Vdc to 15.0 Vdc, while consuming only 50 mV of power. The AWM90000 Series provides customers the ability to customize the sensor functions to meet their application needs.